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Journal: Energies, 2020
Volume: 13
Number: 6196

Article: Optimal Design of High-Frequency Induction Heating Apparatus for Wafer Cleaning Equipment Using Superheated Steam
Authors: by Sang Min Park, Eunsu Jang, Joon Sung Park, Jin-Hong Kim, Jun-Hyuk Choi and Byoung Kuk Lee
Link: https://www.mdpi.com/1996-1073/13/23/6196

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