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Open AccessArticle

Design and Comparison of Resonant and Non-Resonant Single-Layer Microwave Heaters for Continuous Flow Microfluidics in Silicon-Glass Technology

1
IOT Group, imec, Kapeldreef 75, 3001 Heverlee, Belgium
2
Division TELEMIC, Department of Electrical Engineering (ESAT), KU Leuven, Kasteelpark Arenberg 10, 3001 Leuven, Belgium
3
Department of Electronics, Microelectronics, Computer and Intelligent Systems, Faculty of Electrical Engineering and Computing, University of Zagreb, Unska 3, 10000 Zagreb, Croatia
*
Author to whom correspondence should be addressed.
Energies 2020, 13(10), 2635; https://doi.org/10.3390/en13102635
Received: 27 April 2020 / Revised: 15 May 2020 / Accepted: 19 May 2020 / Published: 21 May 2020
(This article belongs to the Special Issue Heat Transfer in Energy Conversion Systems)
This paper presents a novel concept for the co-design of microwave heaters and microfluidic channels for sub-microliter volumes in continuous flow microfluidics. Based on the novel co-design concept, two types of heaters are presented, co-designed and manufactured in high-resistivity silicon-glass technology, resulting in a building block for consumable and mass-producible micro total analysis systems. Resonant and non-resonant co-planar waveguide transmission line heaters are investigated for heating of sub-micro-liter liquid volumes in a channel section at 25 GHz. The heating rates of 16 and 24 °C/s are obtained with power levels of 32 dBm for the through line and the open-ended line microwave heater, respectively. The heating uniformity of developed devices is evaluated with a Rhodamine B and deionized water mixture on a micrometer scale using the microwave-optical measurement setup. Measurement results showed a good agreement with simulations and demonstrated the potential of microwave heating for microfluidics. View Full-Text
Keywords: microwave heating; microfluidics; silicon; chip integration microwave heating; microfluidics; silicon; chip integration
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Markovic, T.; Ocket, I.; Baric, A.; Nauwelaers, B. Design and Comparison of Resonant and Non-Resonant Single-Layer Microwave Heaters for Continuous Flow Microfluidics in Silicon-Glass Technology. Energies 2020, 13, 2635.

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