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Journal: Sensors, 2009
Volume: 9
Number: 6200

Article: Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists
Authors: by Lung-Tai Chen, Jin-Sheng Chang, Chung-Yi Hsu and Wood-Hi Cheng
Link: https://www.mdpi.com/1424-8220/9/8/6200

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