Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates
1
Department of Engineering Science & Mechanics, Virginia Polytechnic Institute & State University, Blacksburg, VA 24061, USA
2
Department of Mechanical & Aerospace Engineering, Polytechnic University, Brooklyn, NY 11201, USA
3
The Bradley Department of Electrical & Computer Engineering, Virginia Polytechnic Institute & State University, Blacksburg, VA 24061, USA
*
Author to whom correspondence should be addressed.
Sensors 2008, 8(2), 1048-1069; https://doi.org/10.3390/s8021048
Received: 21 December 2007
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Accepted: 14 February 2008
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Published: 15 February 2008
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
We study the influence of von Karman nonlinearity, van der Waals force, and a athermal stresses on pull-in instability and small vibrations of electrostatically actuated mi-croplates. We use the Galerkin method to develop a tractable reduced-order model for elec-trostatically actuated clamped rectangular microplates in the presence of van der Waals forcesand thermal stresses. More specifically, we reduce the governing two-dimensional nonlineartransient boundary-value problem to a single nonlinear ordinary differential equation. For thestatic problem, the pull-in voltage and the pull-in displacement are determined by solving apair of nonlinear algebraic equations. The fundamental vibration frequency corresponding toa deflected configuration of the microplate is determined by solving a linear algebraic equa-tion. The proposed reduced-order model allows for accurately estimating the combined effectsof van der Waals force and thermal stresses on the pull-in voltage and the pull-in deflectionprofile with an extremely limited computational effort.
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Keywords:
Microelectromechanical systems; microplate; van der Waals force; pull-in insta- bility; microsensor
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MDPI and ACS Style
Batra, R.C.; Porfiri, M.; Spinello, D. Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates. Sensors 2008, 8, 1048-1069. https://doi.org/10.3390/s8021048
AMA Style
Batra RC, Porfiri M, Spinello D. Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates. Sensors. 2008; 8(2):1048-1069. https://doi.org/10.3390/s8021048
Chicago/Turabian StyleBatra, Romesh C., Maurizio Porfiri, and Davide Spinello. 2008. "Effects of van der Waals Force and Thermal Stresses on Pull-in Instability of Clamped Rectangular Microplates" Sensors 8, no. 2: 1048-1069. https://doi.org/10.3390/s8021048
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