Next Article in Journal
Utilizing of Square Wave Voltammetry to Detect Flavonoids in the Presence of Human Urine
Next Article in Special Issue
Magnetostrictive Microcantilever as an Advanced Transducer for Biosensors
Previous Article in Journal
Development of QCM Trimethylamine Sensor Based on Water Soluble Polyaniline
Previous Article in Special Issue
Quantitative Boundary Support Characterization for Cantilever MEMS
Open AccessArticle

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

1
Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua, Taiwan
2
Department of Architecture, National Cheng Kung University, Tainan, Taiwan 701
*
Author to whom correspondence should be addressed.
Sensors 2007, 7(10), 2389-2401; https://doi.org/10.3390/s7102389
Received: 27 August 2007 / Accepted: 10 October 2007 / Published: 17 October 2007
This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 ω/ms-1), a high velocity measurement limit (45ms-1) and a rapid response time (0.53 s). View Full-Text
Keywords: Flow sensor; Micro-cantilever; Micro-electro-mechanical-system (MEMS); Residual stress. Flow sensor; Micro-cantilever; Micro-electro-mechanical-system (MEMS); Residual stress.
MDPI and ACS Style

Wang, Y.-H.; Lee, C.-Y.; Chiang, C.-M. A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure. Sensors 2007, 7, 2389-2401.

Show more citation formats Show less citations formats

Article Access Map by Country/Region

1
Only visits after 24 November 2015 are recorded.
Back to TopTop