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Journal: Sensors, 2007
Volume: 7
Number: 2389
Article:
A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure
Authors:
by
Yu-Hsiang Wang, Chia-Yen Lee and Che-Ming Chiang
Link:
https://www.mdpi.com/1424-8220/7/10/2389
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