Silicon Photonic On-Chip Spectrometer Based on Cascaded Mach–Zehnder Interferometer
Abstract
1. Introduction
2. Principle and Design
2.1. Principle of the Computational Spectrometer
2.2. Design of the Computational Spectrometer
2.3. Optimization of Reconstruction Algorithms
3. Experiment
3.1. Device Design and Characterization
3.2. Spectral Reconstruction Results
4. Discussion
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
Abbreviations
| MZI | Mach–Zehnder Interferometer |
| AC | Auto-correlation |
| XC | Cross-correlation |
| FSR | Free Spectral Range |
| HWHM | Half Width at Half Maximum |
| SOI | Silicon-on-insulator |
| CMOS | Complementary Metal Oxide Semiconductor |
| CVX | Convex Optimization |
| RMSE | Root Mean Squared Error |
| FWHM | Full Width at Half Maximum |
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| Type | Ref. | Footprint/µm2 | Bandwidth/nm | Resolution/nm | Number of Channels |
|---|---|---|---|---|---|
| Multimode waveguide | [17] | 500 × 500 | 2 | 0.01 | 40 |
| [18] | 1600 × 2100 | 2 | 0.016 | 121 | |
| [19] | -- | 6.4 | 0.16 | 64 | |
| [20] | 1.5 × 106 (With on-chip photodetectors) | 100 | 0.02 | 384 | |
| Disordered media | [21] | 50 × 100 | 25 | 0.75 | 25 |
| [22] | 100 × 200 | 50@1550 nm 15@800 nm | 4@1550 nm 0.03@800 nm | 16 | |
| [23] | 100 × 200 | 40@1550 nm 15@775 nm | 3@1550 nm 0.3@775 nm | 13 | |
| Waveguide filter type | [11] | 2000 × 7600 | 115 | 0.03 | 256 |
| [12] | 40 × 100 (Based on simulation) | 200 | 0.1~2 | 192~2187 | |
| [13] | 520 × 220 | 12 | 0.02 | 64 | |
| [14] | 35 × 260 | 180 | 0.45 | 32 | |
| [24] | 3 × 106 | 100 | 0.1 | 64 | |
| [25] | 60 × 60 | 100 | 0.04 | 2501 | |
| [26] | 2900 × 3700 | 200 | 0.01 | 729 | |
| [27] | 600 × 800 | 40 | 0.06 | 64 | |
| [28] | 5 × 105 | 100 | 0.01~0.3 | 132 | |
| Our work | 550 × 500 | 100 | 0.005 | 216 |
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© 2026 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license.
Share and Cite
Cui, Y.; Yuan, Y.; Zhang, Z.; Huang, B. Silicon Photonic On-Chip Spectrometer Based on Cascaded Mach–Zehnder Interferometer. Sensors 2026, 26, 1470. https://doi.org/10.3390/s26051470
Cui Y, Yuan Y, Zhang Z, Huang B. Silicon Photonic On-Chip Spectrometer Based on Cascaded Mach–Zehnder Interferometer. Sensors. 2026; 26(5):1470. https://doi.org/10.3390/s26051470
Chicago/Turabian StyleCui, Yating, Ye Yuan, Zan Zhang, and Beiju Huang. 2026. "Silicon Photonic On-Chip Spectrometer Based on Cascaded Mach–Zehnder Interferometer" Sensors 26, no. 5: 1470. https://doi.org/10.3390/s26051470
APA StyleCui, Y., Yuan, Y., Zhang, Z., & Huang, B. (2026). Silicon Photonic On-Chip Spectrometer Based on Cascaded Mach–Zehnder Interferometer. Sensors, 26(5), 1470. https://doi.org/10.3390/s26051470

