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Journal: Sensors, 2025
Volume: 25
Number: 6609

Article: Advanced BCl3-Driven Deep Ion Etching of β-Ga2O3 for Precision High-Aspect-Ratio Nanostructures
Authors: by Badriyah Alhalaili
Link: https://www.mdpi.com/1424-8220/25/21/6609

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