Rodrigues, M.J.L.F.; Garcia, I.S.; Santos, J.D.; Mota, F.C.; Alves, F.S.; Aguiam, D.E.
Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup. Sensors 2025, 25, 4627.
https://doi.org/10.3390/s25154627
AMA Style
Rodrigues MJLF, Garcia IS, Santos JD, Mota FC, Alves FS, Aguiam DE.
Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup. Sensors. 2025; 25(15):4627.
https://doi.org/10.3390/s25154627
Chicago/Turabian Style
Rodrigues, Manuel J. L. F., Inês S. Garcia, Joana D. Santos, Filipa C. Mota, Filipe S. Alves, and Diogo E. Aguiam.
2025. "Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup" Sensors 25, no. 15: 4627.
https://doi.org/10.3390/s25154627
APA Style
Rodrigues, M. J. L. F., Garcia, I. S., Santos, J. D., Mota, F. C., Alves, F. S., & Aguiam, D. E.
(2025). Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup. Sensors, 25(15), 4627.
https://doi.org/10.3390/s25154627