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Volume 25
Issue 10
10.3390/s25103004
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This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Article

Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials

by
Yuhang Yang
1,2,
Xinyu Li
3,
Zechun Li
1,2,
Ming Li
1,2,
Ying Chen
1,2,
Shaokui Tan
1,2,
Haitao Yu
1,2,
Pengcheng Xu
1,2,* and
Xinxin Li
1,2,*
1
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
3
Shanghai Aerospace Electronic and Communication Equipment Research Institute, Shanghai 201109, China
*
Authors to whom correspondence should be addressed.
Sensors 2025, 25(10), 3004; https://doi.org/10.3390/s25103004 (registering DOI)
Submission received: 14 April 2025 / Revised: 6 May 2025 / Accepted: 9 May 2025 / Published: 9 May 2025
(This article belongs to the Special Issue Chip-Based MEMS Platforms)
Versions Notes

Abstract

During the thermal analysis of hazardous materials, the thermal instruments available may face the risk of contamination within heating chambers or damage to the instruments themselves. Herein, this work introduces an innovative detection technology that combines thermogravimetric and differential thermal analysis with an integrated MEMS cantilever. Integrating polysilicon thermocouples and a heat-driven resistor into a single resonant cantilever achieves remarkable precision with a mass resolution of 5.5 picograms and a temperature resolution of 0.0082 °C. Validated through the thermal analysis of nylon 6, the cantilever excels in detecting nanogram-level samples, making it ideal for analyzing hazardous materials like ammonium perchlorate and TNT. Notably, it has successfully observed the evaporation of TNT in an air atmosphere. The integrated MEMS cantilever detection chip offers a groundbreaking micro-quantification solution for hazardous material analysis, significantly enhancing safety and opening new avenues for application.
Keywords: MEMS; resonant cantilever; TGA; DTA; thermal analysis MEMS; resonant cantilever; TGA; DTA; thermal analysis

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MDPI and ACS Style

Yang, Y.; Li, X.; Li, Z.; Li, M.; Chen, Y.; Tan, S.; Yu, H.; Xu, P.; Li, X. Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials. Sensors 2025, 25, 3004. https://doi.org/10.3390/s25103004

AMA Style

Yang Y, Li X, Li Z, Li M, Chen Y, Tan S, Yu H, Xu P, Li X. Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials. Sensors. 2025; 25(10):3004. https://doi.org/10.3390/s25103004

Chicago/Turabian Style

Yang, Yuhang, Xinyu Li, Zechun Li, Ming Li, Ying Chen, Shaokui Tan, Haitao Yu, Pengcheng Xu, and Xinxin Li. 2025. "Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials" Sensors 25, no. 10: 3004. https://doi.org/10.3390/s25103004

APA Style

Yang, Y., Li, X., Li, Z., Li, M., Chen, Y., Tan, S., Yu, H., Xu, P., & Li, X. (2025). Integrated Microcantilever for Joint Thermal Analysis of Trace Hazardous Materials. Sensors, 25(10), 3004. https://doi.org/10.3390/s25103004

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