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Journal: SensorsVolume: 24Number: 6764
Article: Piezo-VFETs: Vacuum Field Emission Transistors Controlled by Piezoelectric MEMS Sensors as an Artificial Mechanoreceptor with High Sensitivity and Low Power Consumption
- Authors:
- Chang Ge1,*,†,
- Yuezhong Chen2,† and
- Daolong Yu2
- et al.
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