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Journal: Sensors, 2024
Volume: 24
Number: 3626
Article:
Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection
Authors:
by
Sulaiman Mohaidat and Fadi Alsaleem
Link:
https://www.mdpi.com/1424-8220/24/11/3626
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