Ghanam, M.; Goldschmidtboeing, F.; Bilger, T.; Bucherer, A.; Woias, P.
MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature. Sensors 2023, 23, 4248.
https://doi.org/10.3390/s23094248
AMA Style
Ghanam M, Goldschmidtboeing F, Bilger T, Bucherer A, Woias P.
MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature. Sensors. 2023; 23(9):4248.
https://doi.org/10.3390/s23094248
Chicago/Turabian Style
Ghanam, Muhannad, Frank Goldschmidtboeing, Thomas Bilger, Andreas Bucherer, and Peter Woias.
2023. "MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature" Sensors 23, no. 9: 4248.
https://doi.org/10.3390/s23094248
APA Style
Ghanam, M., Goldschmidtboeing, F., Bilger, T., Bucherer, A., & Woias, P.
(2023). MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature. Sensors, 23(9), 4248.
https://doi.org/10.3390/s23094248