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Journal: Sensors, 2023
Volume: 23
Number: 3280
3280
Article: Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection
Authors: by Tarek Seoudi, Julien Charensol, Wioletta Trzpil, Fanny Pages, Diba Ayache, Roman Rousseau, Aurore Vicet and Michael Bahriz
Link: https://www.mdpi.com/1424-8220/23/6/3280

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