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Journal: Sensors, 2023
Volume: 23
Number: 2521
Article:
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process
Authors:
by
Si-Jun Kim, Min-Su Choi, Sang-Ho Lee, Won-Nyoung Jeong, Young-Seok Lee, In-Ho Seong, Chul-Hee Cho, Dae-Woong Kim and Shin-Jae You
Link:
https://www.mdpi.com/1424-8220/23/5/2521
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