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Journal: Sensors, 2023
Volume: 23
Number: 9557

Article: The Fabrication and Evaluation of a Capacitive Pressure Sensor Using Ru-Based Thin Film Metallic Glass with Structural Relaxation by Heat Treatment
Authors: by Hodaka Otsuka, Takafumi Ninoseki, Chiemi Oka, Seiichi Hata and Junpei Sakurai
Link: https://www.mdpi.com/1424-8220/23/23/9557

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