Piezoresistive Conductive Microfluidic Membranes for Low-Cost On-Chip Pressure and Flow Sensing
Abstract
:1. Introduction
2. Experimental
2.1. Working Principle of Piezoresistive Sensor
2.2. Sensor Microfabrication
2.3. Device Experimental Setup and Operation
3. Results and Discussion
3.1. Sensor Impedance Response
3.2. Finite Element Modelling
3.3. EIS Equivalent Circuit Model
3.4. Impedance Response to Membrane Deformation
3.5. Flow Rate Measurement
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Acknowledgments
Conflicts of Interest
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Islam, M.N.; Doria, S.M.; Fu, X.; Gagnon, Z.R. Piezoresistive Conductive Microfluidic Membranes for Low-Cost On-Chip Pressure and Flow Sensing. Sensors 2022, 22, 1489. https://doi.org/10.3390/s22041489
Islam MN, Doria SM, Fu X, Gagnon ZR. Piezoresistive Conductive Microfluidic Membranes for Low-Cost On-Chip Pressure and Flow Sensing. Sensors. 2022; 22(4):1489. https://doi.org/10.3390/s22041489
Chicago/Turabian StyleIslam, Md. Nazibul, Steven M. Doria, Xiaotong Fu, and Zachary R. Gagnon. 2022. "Piezoresistive Conductive Microfluidic Membranes for Low-Cost On-Chip Pressure and Flow Sensing" Sensors 22, no. 4: 1489. https://doi.org/10.3390/s22041489
APA StyleIslam, M. N., Doria, S. M., Fu, X., & Gagnon, Z. R. (2022). Piezoresistive Conductive Microfluidic Membranes for Low-Cost On-Chip Pressure and Flow Sensing. Sensors, 22(4), 1489. https://doi.org/10.3390/s22041489