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Article

A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams

College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha 410073, China
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Academic Editor: Cigada Alfredo
Sensors 2022, 22(2), 641; https://doi.org/10.3390/s22020641
Received: 20 November 2021 / Revised: 28 December 2021 / Accepted: 11 January 2022 / Published: 14 January 2022
(This article belongs to the Section Nanosensors)
In this paper, a novel two-axis differential resonant accelerometer based on graphene with transmission beams is presented. This accelerometer can not only reduce the cross sensitivity, but also overcome the influence of gravity, realizing fast and accurate measurement of the direction and magnitude of acceleration on the horizontal plane. The simulation results show that the critical buckling acceleration is 460 g, the linear range is 0–89 g, while the differential sensitivity is 50,919 Hz/g, which is generally higher than that of the resonant accelerometer reported previously. Thus, the accelerometer belongs to the ultra-high sensitivity accelerometer. In addition, increasing the length and tension of graphene can obviously increase the critical linear acceleration and critical buckling acceleration with the decreasing sensitivity of the accelerometer. Additionally, the size change of the force transfer structure can significantly affect the detection performance. As the etching accuracy reaches the order of 100 nm, the critical buckling acceleration can reach up to 5 × 104 g, with a sensitivity of 250 Hz/g. To sum up, a feasible design of a biaxial graphene resonant accelerometer is proposed in this work, which provides a theoretical reference for the fabrication of a graphene accelerometer with high precision and stability. View Full-Text
Keywords: graphene resonant; biaxial accelerometer; finite element simulation; differential mode graphene resonant; biaxial accelerometer; finite element simulation; differential mode
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MDPI and ACS Style

Xiao, Y.; Hu, F.; Zhang, Y.; Zheng, J.; Qin, S. A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams. Sensors 2022, 22, 641. https://doi.org/10.3390/s22020641

AMA Style

Xiao Y, Hu F, Zhang Y, Zheng J, Qin S. A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams. Sensors. 2022; 22(2):641. https://doi.org/10.3390/s22020641

Chicago/Turabian Style

Xiao, Yang, Feng Hu, Yuchen Zhang, Jiaxing Zheng, and Shiqiao Qin. 2022. "A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams" Sensors 22, no. 2: 641. https://doi.org/10.3390/s22020641

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