2.5D Flexible Wind Sensor Using Differential Plate Capacitors
Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
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Academic Editor: Yolanda Vidal
Sensors 2021, 21(9), 3101; https://doi.org/10.3390/s21093101
Received: 24 March 2021
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Revised: 21 April 2021
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Accepted: 26 April 2021
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Published: 29 April 2021
(This article belongs to the Section Physical Sensors)
In this paper, a novel 2.5-dimensional (2.5D) flexible wind sensor is proposed based on four differential plate capacitors. This design consists of a windward pillar, two electrode layers, and a support layer, which are all made of polydimethylsiloxane (PDMS) with different Young’s moduli. A 2 mm × 2 mm copper electrode array is located on each electrode layer, forming four parallel plate capacitors as the sensitive elements. The wind in the xy-plane tilts the windward pillar, decreasing two capacitances on the windward side and increasing two capacitances on the leeward side. The wind in the z-axis depresses the windward pillar, resulting in an increase of all four capacitances. Experiments demonstrate that this sensor can measure the wind speed up to 23.9 m/s and the wind direction over the full 360° range of the xy-plane. The sensitivities of wind speed are close to 4 fF·m−1·s and 3 fF·m−1·s in the xy-plane and z-axis, respectively.
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Keywords:
wind sensor; flexible; 2.5D; capacitors
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MDPI and ACS Style
Wan, Y.; Yi, Z. 2.5D Flexible Wind Sensor Using Differential Plate Capacitors. Sensors 2021, 21, 3101. https://doi.org/10.3390/s21093101
AMA Style
Wan Y, Yi Z. 2.5D Flexible Wind Sensor Using Differential Plate Capacitors. Sensors. 2021; 21(9):3101. https://doi.org/10.3390/s21093101
Chicago/Turabian StyleWan, Yu, and Zhenxiang Yi. 2021. "2.5D Flexible Wind Sensor Using Differential Plate Capacitors" Sensors 21, no. 9: 3101. https://doi.org/10.3390/s21093101
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