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Article

Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level

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Laboratoire Commun de Métrologie (LCM), Laboratoire National de Métrologie et d’Essais (LNE), 1 Rue Gaston Boissier, 75015 Paris, France
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Université Paris-Saclay, Université Sorbonne Paris Nord, ENS Paris-Saclay, LURPA, 91190 Gif-sur-Yvette, France
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Manufacturing Metrology Team, Faculty of Engineering, University of Nottingham (UNOTT), Nottingham NG8 1BB, UK
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VTT Technical Research Centre of Finland Ltd., Centre for Metrology MIKES, Tekniikantie 1, 02150 Espoo, Finland
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THALES LAS France, Etablissement de Saint Heand, Boulevard Ravel de Malval, 42570 Saint Heand, France
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TOPTEC, Institute of Plasma Physics of the Czech Academy of Sciences, Za Slovankou 1782/3, 182 00 Praha, Czech Republic
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National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba, Ibaraki 305-8563, Japan
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Institute of Applied Optics (ITO), University Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany
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Department of Mechanical Engineering, College of Engineering, Prince Sattam bin Abdulaziz University (PSAU), Alkharj 16273, Saudi Arabia
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Shanghai Engineering Centre of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Marco Grasso
Sensors 2021, 21(4), 1103; https://doi.org/10.3390/s21041103
Received: 16 January 2021 / Revised: 31 January 2021 / Accepted: 2 February 2021 / Published: 5 February 2021
(This article belongs to the Special Issue Multisensor Data Fusion Methods in Advanced Manufacturing)
The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes. View Full-Text
Keywords: robust reference minimum zone (Hybrid Trust Region) fitting; aspheric and freeform optical elements; ultra-high precision measuring machine; dimensional metrology; measured data evaluation; uncertainty robust reference minimum zone (Hybrid Trust Region) fitting; aspheric and freeform optical elements; ultra-high precision measuring machine; dimensional metrology; measured data evaluation; uncertainty
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MDPI and ACS Style

Arezki, Y.; Su, R.; Heikkinen, V.; Leprete, F.; Posta, P.; Bitou, Y.; Schober, C.; Mehdi-Souzani, C.; Alzahrani, B.A.M.; Zhang, X.; Kondo, Y.; Pruss, C.; Ledl, V.; Anwer, N.; Bouazizi, M.L.; Leach, R.; Nouira, H. Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level. Sensors 2021, 21, 1103. https://doi.org/10.3390/s21041103

AMA Style

Arezki Y, Su R, Heikkinen V, Leprete F, Posta P, Bitou Y, Schober C, Mehdi-Souzani C, Alzahrani BAM, Zhang X, Kondo Y, Pruss C, Ledl V, Anwer N, Bouazizi ML, Leach R, Nouira H. Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level. Sensors. 2021; 21(4):1103. https://doi.org/10.3390/s21041103

Chicago/Turabian Style

Arezki, Yassir, Rong Su, Ville Heikkinen, François Leprete, Pavel Posta, Youichi Bitou, Christian Schober, Charyar Mehdi-Souzani, Bandar Abdulrahman Mohammed Alzahrani, Xiangchao Zhang, Yohan Kondo, Christof Pruss, Vit Ledl, Nabil Anwer, Mohamed Lamjed Bouazizi, Richard Leach, and Hichem Nouira. 2021. "Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level" Sensors 21, no. 4: 1103. https://doi.org/10.3390/s21041103

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