Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference
Abstract
:1. Introduction
2. Acoustic Injection Experiment
2.1. Acoustic Injection Experiment Facility
2.2. Acoustic Injection Experiment with Frequency Sweeping
2.3. Acoustic Injection Experiment with Amplitude Sweeping
3. A Mathematical Model of the Accelerometer with Acoustic Injection Attacks
3.1. A Mathematical Model for Bilateral Asymmetric Clips
3.2. The Mathematical Model Fit with Acoustic Injection Experiment with Amplitude Sweeping
3.3. The Mathematical Model Fit with Acoustic Injection Experiment with Frequency Sweeping
4. Simulation of the Dual Frequency Acoustic Injection Attack
5. Experiment of Dual Frequency Acoustic Injection Attack
5.1. Acoustic Injection Attack Experiment with Two Superimposed Single Frequencies
5.2. Acoustic Injection Attack Experiment of Single Frequency and Sweeping Frequency Superimposing
5.3. Acoustic Injection Attack Experiment of Two Sweeping-Frequency Superimposing
6. Discussion
6.1. MEMS Accelerometers with Different Damping Ratios
6.2. Preposition Low-Pass Filter
7. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Parameter Name (unit) | Symbol | Parameter Value |
---|---|---|
Damping ratio | δ | 0.07 |
Natural frequency (rad/s) | ω0 | 33037.9 |
Maximum value that can be output (a.u.) | amax | 38.26 |
Minimum value that can be output (a.u.) | amin | −26.72 |
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Guo, P.; Zhang, J.; Feng, L.; Cui, J.; Xing, C. Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference. Sensors 2021, 21, 945. https://doi.org/10.3390/s21030945
Guo P, Zhang J, Feng L, Cui J, Xing C. Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference. Sensors. 2021; 21(3):945. https://doi.org/10.3390/s21030945
Chicago/Turabian StyleGuo, Peng, Jiayu Zhang, Lihui Feng, Jianmin Cui, and Chaoyang Xing. 2021. "Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference" Sensors 21, no. 3: 945. https://doi.org/10.3390/s21030945
APA StyleGuo, P., Zhang, J., Feng, L., Cui, J., & Xing, C. (2021). Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference. Sensors, 21(3), 945. https://doi.org/10.3390/s21030945