Sun, C.; Liu, Y.; Li, B.; Su, W.; Luo, M.; Du, G.; Wu, Y.
Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors 2021, 21, 5513.
https://doi.org/10.3390/s21165513
AMA Style
Sun C, Liu Y, Li B, Su W, Luo M, Du G, Wu Y.
Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors. 2021; 21(16):5513.
https://doi.org/10.3390/s21165513
Chicago/Turabian Style
Sun, Changhe, Yufei Liu, Bolun Li, Wenqu Su, Mingzhang Luo, Guofeng Du, and Yaming Wu.
2021. "Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles" Sensors 21, no. 16: 5513.
https://doi.org/10.3390/s21165513
APA Style
Sun, C., Liu, Y., Li, B., Su, W., Luo, M., Du, G., & Wu, Y.
(2021). Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. Sensors, 21(16), 5513.
https://doi.org/10.3390/s21165513