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Journal: Sensors, 2021
Volume: 21
Number: 5345

Article: Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature Measurement
Authors: by Ling Dong, Yang Li, Jingwen Lv, Hongchuan Jiang and Wanli Zhang
Link: https://www.mdpi.com/1424-8220/21/16/5345

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