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Journal: Sensors, 2021
Volume: 21
Number: 5345
Article:
Fabrication of Weak C-Axis Preferred AlN Thin Film for Temperature Measurement
Authors:
by
Ling Dong, Yang Li, Jingwen Lv, Hongchuan Jiang and Wanli Zhang
Link:
https://www.mdpi.com/1424-8220/21/16/5345
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