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Article

Observation of CO Detection Using Aluminum-Doped ZnO Nanorods on Microcantilever

1
Center for Materials Technology, Agency for the Assessment and Application of Technology, Puspiptek Building #224, South Tangerang, Banten 15314, Indonesia
2
Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Shizuoka, Japan
3
Department of Electrical Engineering, Faculty of Engineering, Universitas Indonesia, Depok, West Java 16424, Indonesia
4
Center for Technology and Safety of Nuclear Reactor, National Nuclear Energy Agency, Puspiptek, South Tangerang, Banten 15314, Indonesia
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(7), 2013; https://doi.org/10.3390/s20072013
Received: 31 January 2020 / Revised: 13 March 2020 / Accepted: 18 March 2020 / Published: 3 April 2020
An oscillating piezoresistive microcantilever (MC) coated with an aluminum (Al)-doped zinc oxide (ZnO) nanorods was used to detect carbon monoxide (CO) in air at room temperature. Al-doped ZnO nanorods were grown on the MC surface using the hydrothermal method, and a response to CO gas was observed by measuring a resonant frequency shift of vibrated MC. CO gas response showed a significant increase in resonant frequency, where sensitivity in the order of picogram amounts was obtained. An increase in resonant frequency was also observed with increasing gas flow rate, which was simultaneously followed by a decrease in relative humidity, indicating that the molecular interface between ZnO and H2O plays a key role in CO absorption. The detection of other gases of carbon compounds such as CO2 and CH4 was also performed; the sensitivity of CO was found to be higher than those gases. The results demonstrate the reversibility and reproducibility of the proposed technique, opening up future developments of highly sensitive CO-gas detectors with a fast response and room temperature operation. View Full-Text
Keywords: microcantilever sensor; ZnO nanorods; Al doping; resonant frequency shift; CO detection microcantilever sensor; ZnO nanorods; Al doping; resonant frequency shift; CO detection
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MDPI and ACS Style

Nuryadi, R.; Aprilia, L.; Hosoda, M.; Barique, M.A.; Udhiarto, A.; Hartanto, D.; Setiawan, M.B.; Neo, Y.; Mimura, H. Observation of CO Detection Using Aluminum-Doped ZnO Nanorods on Microcantilever. Sensors 2020, 20, 2013. https://doi.org/10.3390/s20072013

AMA Style

Nuryadi R, Aprilia L, Hosoda M, Barique MA, Udhiarto A, Hartanto D, Setiawan MB, Neo Y, Mimura H. Observation of CO Detection Using Aluminum-Doped ZnO Nanorods on Microcantilever. Sensors. 2020; 20(7):2013. https://doi.org/10.3390/s20072013

Chicago/Turabian Style

Nuryadi, Ratno, Lia Aprilia, Makoto Hosoda, Mohamad A. Barique, Arief Udhiarto, Djoko Hartanto, Muhammad B. Setiawan, Yoichiro Neo, and Hidenori Mimura. 2020. "Observation of CO Detection Using Aluminum-Doped ZnO Nanorods on Microcantilever" Sensors 20, no. 7: 2013. https://doi.org/10.3390/s20072013

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