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Article

Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor

1
National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe hwy 31, 115409 Moscow, Russia
2
“INKRAM” LLC Research and Production Company (“Inkram” RPC LLC), Mikhalkovskaya Street 63 “Б”, Bldg. 1, Floor 3, Premise VII, 125438 Moscow, Russia
*
Author to whom correspondence should be addressed.
Sensors 2020, 20(5), 1514; https://doi.org/10.3390/s20051514
Received: 1 February 2020 / Revised: 29 February 2020 / Accepted: 6 March 2020 / Published: 10 March 2020
A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal–insulator–semiconductor (MIS) structure type Pd–SiO2–Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 × 10−9 g, which corresponds to concentration from 10−11 g/cm3 to 10−12 g/cm3. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown. View Full-Text
Keywords: field effect gas sensor; MIS structure type Pd–SnO2–SiO2–Si; NO2 gas detection in ppb level; pyrolysis of nitro compound vapor field effect gas sensor; MIS structure type Pd–SnO2–SiO2–Si; NO2 gas detection in ppb level; pyrolysis of nitro compound vapor
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MDPI and ACS Style

Samotaev, N.; Litvinov, A.; Etrekova, M.; Oblov, K.; Filipchuk, D.; Mikhailov, A. Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor. Sensors 2020, 20, 1514. https://doi.org/10.3390/s20051514

AMA Style

Samotaev N, Litvinov A, Etrekova M, Oblov K, Filipchuk D, Mikhailov A. Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor. Sensors. 2020; 20(5):1514. https://doi.org/10.3390/s20051514

Chicago/Turabian Style

Samotaev, Nikolay, Artur Litvinov, Maya Etrekova, Konstantin Oblov, Dmitrii Filipchuk, and Alexey Mikhailov. 2020. "Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor" Sensors 20, no. 5: 1514. https://doi.org/10.3390/s20051514

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