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Journal: Sensors, 2019
Volume: 19
Number: 2073
Article:
Proximity Gettering Design of Hydrocarbon–Molecular–Ion–Implanted Silicon Wafers Using Dark Current Spectroscopy for CMOS Image Sensors
Authors:
by
Kazunari Kurita, Takeshi Kadono, Satoshi Shigematsu, Ryo Hirose, Ryosuke Okuyama, Ayumi Onaka-Masada, Hidehiko Okuda and Yoshihiro Koga
Link:
https://www.mdpi.com/1424-8220/19/9/2073
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