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Sensors 2019, 19(6), 1368;

Vibration Detection and Motion Compensation for Multi-Frequency Phase-Shifting-Based 3D Sensors

State Key Laboratory of Material Processing and Die & Mould Technology, Huazhong University of Science and Technology, Wuhan 430074, China
Xi’an Aerospace Precision Electromechanical Institute, Xi’an 710100, China
Wuhan Vision 3D Technology Ltd., Wuhan 430074, China
Authors to whom correspondence should be addressed.
Received: 29 January 2019 / Revised: 4 March 2019 / Accepted: 14 March 2019 / Published: 19 March 2019
(This article belongs to the Section Physical Sensors)
PDF [7227 KB, uploaded 19 March 2019]


Phase-shifting profilometry, especially employing the multi-frequency phase-shifting method, is increasingly used for in situ 3D metrology and for the inspection of industrial parts. However, environmental vibrations cause fatal measurement errors and are inevitable in such applications. To this end, an effective and fast vibration detection and motion compensation method for multi-frequency phase-shifting-based 3D sensors is presented. The proposed method quantitatively indicates the strength of the vibration and compensates for the motion error by revising the wrapped phase without accessing neighboring pixels. Different vibration intensities were simulated using an industrial robot moving to test the feasibility of the method. According to experiments, this method is valid and capable for 3D inspection systems affected by inevitable vibrations. View Full-Text
Keywords: multi-frequency phase-shifting method; vibration detection; motion compensation multi-frequency phase-shifting method; vibration detection; motion compensation

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Han, L.; Li, Z.; Zhong, K.; Cheng, X.; Luo, H.; Liu, G.; Shang, J.; Wang, C.; Shi, Y. Vibration Detection and Motion Compensation for Multi-Frequency Phase-Shifting-Based 3D Sensors. Sensors 2019, 19, 1368.

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