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On-Channel Integrated Optofluidic Pressure Sensor with Optically Boosted Sensitivity

Center for Nanotechnology, Zewail City of Science and Technology, October Gardens, 6th of October, Giza 12578, Egypt
Université Paris-Est, ESIEE Paris, ESYCOM EA 2552, 93162 Noisy-le-Grand, France
Faculty of Engineering, Ain-Shams University, Cairo 11566, Egypt
Author to whom correspondence should be addressed.
Sensors 2019, 19(4), 944;
Received: 21 January 2019 / Revised: 17 February 2019 / Accepted: 20 February 2019 / Published: 23 February 2019
(This article belongs to the Special Issue Optical Sensing Based on Microscale Devices)
PDF [2871 KB, uploaded 23 February 2019]


A novel optofluidic sensor that measures the local pressure of the fluid inside a microfluidic channel is presented. It can be integrated directly on-channel and requires no additional layers in fabrication. The detection can be accomplished at a single wavelength; and thereby, only a single laser diode and a single photodetector are required. This renders the sensor to be compact, cheap and easy to fabricate. Basically, the sensor consisted of a Fabry–Pérot microresonator enclosing the fluidic channel. A novel structure of the Fabry–Pérot was employed to achieve high-quality factor, that was essential to facilitate the single wavelength detection. The enhanced performance was attributed to the curved mirrors and cylindrical lenses used to avoid light diffraction loss. The presented sensor was fabricated and tested with deionized water liquid and shown to exhibit a sensitivity up to 12.46 dBm/bar, and a detection limit of 8.2 mbar. Numerical simulations are also presented to evaluate the mechanical–fluidic performance of the device. View Full-Text
Keywords: Fabry–Pérot cavity; optical pressure sensor; integrated microresonator; Bragg mirrors Fabry–Pérot cavity; optical pressure sensor; integrated microresonator; Bragg mirrors

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Gaber, N.; Altayyeb, A.; Soliman, S.A.; Sabry, Y.M.; Marty, F.; Bourouina, T. On-Channel Integrated Optofluidic Pressure Sensor with Optically Boosted Sensitivity. Sensors 2019, 19, 944.

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