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Journal: Sensors, 2019
Volume: 19
Number: 4696

Article: Piezoelectric Micromachined Ultrasonic Transducers with a Cost-Effective Bottom-Up Fabrication Scheme for Millimeter-Scale Range Finding
Authors: by Guo-Hua Feng and Hua-Jin Liu
Link: https://www.mdpi.com/1424-8220/19/21/4696

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