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Open AccessArticle

Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction

Institute of Optics and Electronics, Chinese Academy of Sciences, 610209 Chengdu, China
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Sensors 2019, 19(2), 367; https://doi.org/10.3390/s19020367
Received: 14 December 2018 / Revised: 15 January 2019 / Accepted: 15 January 2019 / Published: 17 January 2019
(This article belongs to the Special Issue Sensors for Precision Dimensional Metrology)
Scanning mirrors appear to be key components in optoelectronic systems for line-of-sight (LOS) stabilization. For improving the angular accuracy of a scanning mirror based on the eddy current displacement sensor measurement, an angular error-correction method is proposed and demonstrated. A mathematic angular error model with physical parameters was developed, and the cross-validation method was employed to determine the reasonable order of the Maclaurin series used in the error model, which increased the exactitude and robustness of the correction method. The error parameters were identified by accurately fitting the calibrated angular errors with the error model, which showed excellent error prediction performance. Based on the angular calculation model corrected by the error model, the closed-loop control system was established to obtain accurate deflection angles. Experimental results show that within the deflection angle of ±1.5 deg, the angular accuracy was improved from 0.28 deg to less than 1.1 arcsec, and the standard deviation for six measurements was less than 1.2 arcsec, which indicates that the angle correction method was effective in improving the linearity of the eddy current sensors and reducing the influence of manufacturing and installation errors. View Full-Text
Keywords: scanning mirror; angular accuracy; eddy current displacement sensor; error model; angle calibration; model correction scanning mirror; angular accuracy; eddy current displacement sensor; error model; angle calibration; model correction
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Fan, Y.; Ma, W.; Jiang, P.; Huang, J.; Chen, K.; Pan, N. Improving Angular Accuracy of a Scanning Mirror Based on Error Modeling and Correction. Sensors 2019, 19, 367.

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