Fabrication and Hypersonic Wind Tunnel Validation of a MEMS Skin Friction Sensor Based on Visual Alignment Technology
1
Hypervelocity Aerodynamics Institute, China Aerodynamics Research and Development Center (CARDC), Mianyang 621000, China
2
College of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(17), 3803; https://doi.org/10.3390/s19173803
Received: 7 July 2019
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Revised: 27 August 2019
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Accepted: 28 August 2019
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Published: 3 September 2019
(This article belongs to the Special Issue Advances in Flow and Wind Sensors)
MEMS-based skin friction sensors are used to measure and validate skin friction and its distribution, and their advantages of small volume, high reliability, and low cost make them very important for vehicle design. Aiming at addressing the accuracy problem of skin friction measurements induced by existing errors of sensor fabrication and assembly, a novel fabrication technology based on visual alignment is presented. Sensor optimization, precise fabrication of key parts, micro-assembly based on visual alignment, prototype fabrication, static calibration and validation in a hypersonic wind tunnel are implemented. The fabrication and assembly precision of the sensor prototypes achieve the desired effect. The results indicate that the sensor prototypes have the characteristics of fast response, good stability and zero-return; the measurement ranges are 0–100 Pa, the resolution is 0.1 Pa, the repeatability accuracy and linearity are better than 1%, the repeatability accuracy in laminar flow conditions is better than 2% and it is almost 3% in turbulent flow conditions. The deviations between the measured skin friction coefficients and numerical solutions are almost 10% under turbulent flow conditions; whereas the deviations between the measured skin friction coefficients and the analytical values are large (even more than 100%) under laminar flow conditions. The error resources of direct skin friction measurement and their influence rules are systematically analyzed.
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Keywords:
skin friction measurement; hypersonic wind tunnel; MEMS skin friction sensor; visual aligning; validation
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MDPI and ACS Style
Wang, X.; Wang, N.; Xu, X.; Zhu, T.; Gao, Y. Fabrication and Hypersonic Wind Tunnel Validation of a MEMS Skin Friction Sensor Based on Visual Alignment Technology. Sensors 2019, 19, 3803. https://doi.org/10.3390/s19173803
AMA Style
Wang X, Wang N, Xu X, Zhu T, Gao Y. Fabrication and Hypersonic Wind Tunnel Validation of a MEMS Skin Friction Sensor Based on Visual Alignment Technology. Sensors. 2019; 19(17):3803. https://doi.org/10.3390/s19173803
Chicago/Turabian StyleWang, Xiong, Nantian Wang, Xiaobin Xu, Tao Zhu, and Yang Gao. 2019. "Fabrication and Hypersonic Wind Tunnel Validation of a MEMS Skin Friction Sensor Based on Visual Alignment Technology" Sensors 19, no. 17: 3803. https://doi.org/10.3390/s19173803
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