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Article

Locating Ultrasonic Signals Employing MEMS-On-Fiber Sensors

by 1,†, 1,†, 2,3,†, 2,3, 2,3, 4 and 2,3,*
1
State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China
2
Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi’an 710072, China
3
Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi’an 710072, China
4
Xi’an Maorong Power Equipment Co., Ltd., Xi’an 710048, China
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Sensors 2019, 19(17), 3696; https://doi.org/10.3390/s19173696
Received: 18 July 2019 / Revised: 14 August 2019 / Accepted: 21 August 2019 / Published: 26 August 2019
(This article belongs to the Section Optical Sensors)
Sound sensing finds wide applications in various fields, such as underwater detection, structural health monitoring, and medical diagnosis, to name just a few. Based on our previously developed MEMS-on-fiber sensors, showing the advantages of low cost, small volume, and high performance, a three-dimensional ultrasonic localization system employing four such sensors was established in this work. A time difference of arrival (TDOA) algorithm was utilized to analyze the acquired data and then calculate the accurate position of the ultrasonic signal source. Plenty of practical measurements were performed, and the derived localization deviation in the region of 2 m × 2 m × 1 m was about 2–5 mm. Outside this region, the deviation tended to increase due to the directional sensitivity existing in these sensors. As a result, for a more accurate localization requirement, more sensing probes are needed in order to depict a completely suitable application situation for MEMS technology. View Full-Text
Keywords: sound sensing; ultrasonic signal localization; MEMS-on-fiber sensor; time difference of arrival (TDOA) sound sensing; ultrasonic signal localization; MEMS-on-fiber sensor; time difference of arrival (TDOA)
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MDPI and ACS Style

Si, W.; Fu, C.; Li, H.; Lv, J.; Xiong, C.; Yuan, P.; Yu, Y. Locating Ultrasonic Signals Employing MEMS-On-Fiber Sensors. Sensors 2019, 19, 3696. https://doi.org/10.3390/s19173696

AMA Style

Si W, Fu C, Li H, Lv J, Xiong C, Yuan P, Yu Y. Locating Ultrasonic Signals Employing MEMS-On-Fiber Sensors. Sensors. 2019; 19(17):3696. https://doi.org/10.3390/s19173696

Chicago/Turabian Style

Si, Wenrong, Chenzhao Fu, Haoyong Li, Jiaming Lv, Chaoyu Xiong, Peng Yuan, and Yiting Yu. 2019. "Locating Ultrasonic Signals Employing MEMS-On-Fiber Sensors" Sensors 19, no. 17: 3696. https://doi.org/10.3390/s19173696

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