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Open AccessArticle

Design of the Squared Daisy: A Multi-Mode Energy Harvester, with Reduced Variability and a Non-Linear Frequency Response

Department of Electrical Engineering, École de Technologie Supérieure, Montréal, QC H3C 1K3, Canada
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Sensors 2019, 19(15), 3247; https://doi.org/10.3390/s19153247
Received: 1 July 2019 / Revised: 19 July 2019 / Accepted: 21 July 2019 / Published: 24 July 2019
(This article belongs to the Special Issue MEMS Sensors and Resonators)
With the rise of the Internet of Things (IoT) and the ever-increasing number of integrated sensors, the question of powering these devices represents an additional challenge. The traditional approach is to use a battery; however, harvesting energy from the environment seems to be the most practical approach. To that end, the use of piezoelectric MEMS energy has been proven as a potential power source in a wide range of applications. In this work, a proof of concept for a new architecture for MEMS energy harvesters is presented. The influence of the dimensions and different characteristics of these designs is discussed. These designs have been proven to be resilient to process variation thanks to their unique architecture. This work presents the use of vibration enhancement petals in order to widen the bandwidth of the energy harvester and provide a non-linear frequency response. The use of these vibration enhancement petals has allowed the fabrication of three design variations, each using an area of 1700 µm by 1700 µm. These designs have an operating bandwidth between 3.9 kHz and 14.5 kHz and can be scaled to achieve other targeted resonant frequencies. View Full-Text
Keywords: MEMS; energy harvesters; piezo-electricity; vibrations; aluminum nitride; process variation; non-linear; multi-mode MEMS; energy harvesters; piezo-electricity; vibrations; aluminum nitride; process variation; non-linear; multi-mode
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MDPI and ACS Style

Gratuze, M.; Alameh, A.H.; Nabki, F. Design of the Squared Daisy: A Multi-Mode Energy Harvester, with Reduced Variability and a Non-Linear Frequency Response. Sensors 2019, 19, 3247. https://doi.org/10.3390/s19153247

AMA Style

Gratuze M, Alameh AH, Nabki F. Design of the Squared Daisy: A Multi-Mode Energy Harvester, with Reduced Variability and a Non-Linear Frequency Response. Sensors. 2019; 19(15):3247. https://doi.org/10.3390/s19153247

Chicago/Turabian Style

Gratuze, Mathieu; Alameh, Abdul H.; Nabki, Frederic. 2019. "Design of the Squared Daisy: A Multi-Mode Energy Harvester, with Reduced Variability and a Non-Linear Frequency Response" Sensors 19, no. 15: 3247. https://doi.org/10.3390/s19153247

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