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Correction published on 23 July 2019, see Sensors 2019, 19(14), 3243.
Open AccessArticle

Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

1
Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
2
Carinthia Institute for Smart Materials and Manufacturing Technologies (CiSMAT), Carinthia University of Applied Sciences, 9524 Villach/St. Magdalen, Austria
3
Dipartimento di Ingegneria Industriale, Alma Mater Studiorum Università di Bologna, Viale Risorgimento 2, I-40136 Bologna, Italy
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(10), 2421; https://doi.org/10.3390/s19102421
Received: 1 March 2019 / Revised: 3 April 2019 / Accepted: 28 April 2019 / Published: 27 May 2019
(This article belongs to the Special Issue Advances in Surface Acoustic Wave Sensors)
Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Surface Acoustic Waves, and it extends the vacuum sensed range to between 10−4 Pa and 105 Pa all along a complete wireless operation. A thermal analysis was performed based on gas kinetic theory, aiming to optimize the thermal conductivity and the Knudsen regime of the device. Theoretical analysis and simulation allowed designing the structure of the sensor and its dimensions to ensure the highest sensitivity through the whole sensing range and to build a model that simulates the behavior of the sensor under vacuum. A completely new design and a model simulating the behavior of the sensor from high vacuum to atmospheric pressure were established. View Full-Text
Keywords: vacuum sensor; Pirani; surface acoustic waves; wireless sensors vacuum sensor; Pirani; surface acoustic waves; wireless sensors
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MDPI and ACS Style

Toto, S.; Nicolay, P.; Morini, G.L.; Rapp, M.; Korvink, J.G.; Brandner, J.J. Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity. Sensors 2019, 19, 2421.

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