Correction: Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

The authors wish to make the following erratum to Reference [1]:

The

Table 2. Detection principles and pressure ranges of micro-electro-mechanical system (MEMS) Pirani gauges.

Researcher	Type of Gauge	Pressure Range (Pa)
Van Herwaarden and Sarro, 1988 [9]	Heated cantilever combined with thermopile	0.13–13,300
Völklein and Schnelle, 1991 [10]	Heated resistor combined with thermopile	0.13–10
Piotto et al., 2016 [11]	Heated resistor with thermopile	0.3–105
Mastrangelo and Muller, 1991 [12]	Microbridge	10–10,000
Swart et al., 1994 [13]	Microbridge	13–1.33 × 105
Chae et al., 2004 [14]	Microbridge	2.6–267
Moelders et al., 2004 [15]	Microbridge	1.33–133
Doms et al., 2005 [16]	Microbridge	100–105
Stark et al., 2005 [17]	Microbridge	1.33–106
Mitchell et al., 2008 [18]	Microbridge	1.33–105
Khosraviani and Leung, 2009 [19]	Microbridge	13.3–106
Li et al., 2009 [20]	Microbridge	10.6–26,665
Jiang et al., 2010 [21]	Microbridge	0.1–1,000
Chen, 2012 [22]	Microbridge	133–1.33 × 105
Puers et al., 2002 [23]	Microbridge	100–107
Moutaouekkil et al., 2015 [24]	Microbridge	1,000–105
Mailly et al., 2009 [25]	Microbridge	20–20,000
Robinson et al., 1992 [26]	Resistor on dielectric membrane	10–13,300
Paul et al., 1994 [27]	Resistor on dielectric membrane	100–105
Weng and Shie, 1994 [5]	Resistor on dielectric membrane	1.33 × 10−5–133
Shie et al., 1995 [28]	Resistor on dielectric membrane	13.3–1.33 × 107
De Jong et al., 2003 [29]	Resistor on dielectric membrane	10–20,000
Zhang et al., 2006 [30]	Resistor on dielectric membrane	10–105
Völklein et al., 2013 [3]	Resistor on dielectric membrane	1.33 × 10−4–1332
Grau et al., 2014 [6]	Resistor on dielectric membrane	0.13–105
Xiao et al., 2011 [7]	Resistor on dielectric membrane	1–1,000
Takashima et al., 2008 [31]	Resistor on dielectric membrane	0.002–105
Jeon et al., 2016 [32]	Resistor on dielectric membrane	0.013–105
Paul and Baltes, 1995 [33]	Resistor on dielectric membrane	100–106
Wenzel and Bak, 1998 [34]	Resistor on diaphragm	10–105
Qiu et al., 2009 [35]	Metallic wire	1–100
Brun et al., 2012 [36]	Silicon nanowire	50–105
Ghouila-Houri et al., 2017 [37]	Microwire	10,000–8 × 105
Schelcher et al., 2011 [38]	Ni-microbeam	3.3–105
Wang et al., 2010 [39]	Microplate	0.1–105
Santagata et al., 2011 [40]	Tube-shaped	0.133–1.33 × 105
Mercier et al., 2012 [41]	Cr/Au-resistor on LiNbO3-substrate (SAW device)	0.001–105

below contained false reference numbers. The references were corrected. The corrected references are also available below.

The authors would like to apologize for any inconvenience caused to the readers by these changes.

Corrected references for Reference [1]

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