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Journal: Sensors, 2018
Volume: 18
Number: 2520
Article:
High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs
Authors:
by
Byung Chul Lee, Amin Nikoozadeh, Kwan Kyu Park and Butrus T. Khuri-Yakub
Link:
https://www.mdpi.com/1424-8220/18/8/2520
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