Next Article in Journal
Two-Dimensional Direction-of-Arrival Fast Estimation of Multiple Signals with Matrix Completion Theory in Coprime Planar Array
Next Article in Special Issue
Reliability Evaluation and Robust Design of a Sensor in an Entire Roller-Embedded Shapemeter
Previous Article in Journal
An Unambiguous Delay-And-Multiply Acquisition Scheme for GPS L1C Signals
Previous Article in Special Issue
A 3D-Printed Multichannel Viscometer for High-Throughput Analysis of Frying Oil Quality
Article Menu
Issue 6 (June) cover image

Export Article

Open AccessArticle

Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

State Key Lab of Power Systems, Department of Electrical Engineering, Tsinghua University, Beijing 100084, China
Electric Power Research Institute, China Southern Power Grid, Guangzhou 510000, China
Department of Microelectronics and Nanoelectronics, Tsinghua University, Beijing 100084, China
Authors to whom correspondence should be addressed.
Sensors 2018, 18(6), 1740;
Received: 10 April 2018 / Revised: 17 May 2018 / Accepted: 24 May 2018 / Published: 28 May 2018
(This article belongs to the Special Issue Sensors for MEMS and Microsystems)
PDF [7508 KB, uploaded 20 June 2018]


Thus far, despite the development of electric field sensors (EFSs) such as field mills, optoelectronic EFSs and microelectromechanical system (MEMS)-based EFSs, no sensor can accurately measure an electric field in space due to the existence of space charge and the influence of charge attachment. To measure a spatial synthetic electric field in an ion flow field, a double potential independent differential EFS based on MEMS is proposed. Compared with other EFSs, this method has the advantages of independent potential (without grounding) and the ability to support the measurement of the synthetic ion flow electric field in space. First, to analyse the charge distribution after the sensor is involved exposed to an electric field, a simulation model was constructed. Then, given the redistribution of the spatial electric field in space and the influence of the surface charge on the sensor, the quantitative relationship between the electric field to be measured and that measured by the proposed sensor was obtained. To improve the performance of the EFS, a set of synthetic field strength sensor calibration systems that consider spatial ion flow injection was established. Furthermore, the parameter λ, which is related to the relative position of the differential chips, was determined. Finally, a series of comparative experiments indicated that the differential EFS highlighted in the present study exhibits good linearity and accuracy. View Full-Text
Keywords: ion flow; electric field sensor; MEMS; potential independent; differential structure ion flow; electric field sensor; MEMS; potential independent; differential structure

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Mou, Y.; Yu, Z.; Huang, K.; Ma, Q.; Zeng, R.; Wang, Z. Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field. Sensors 2018, 18, 1740.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top