A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor
AbstractThis paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene-based electrochemical seismic sensors were fabricated in which the thickness of the insulating spacer was 6.7 μm. Compared to silicon-based counterparts with ~100 μm insulating layers, the parylene-based devices produced higher sensitivities of 490.3 ± 6.1 V/(m/s) vs. 192.2 ± 1.9 V/(m/s) at 0.1 Hz, 4764.4 ± 18 V/(m/s) vs. 318.9 ± 6.5 V/(m/s) at 1 Hz, and 4128.1 ± 38.3 V/(m/s) vs. 254.5 ± 4.2 V/(m/s) at 10 Hz. In addition, the outputs of the parylene vs. silicon devices in response to two transit inputs were compared, producing peak responses of 2.97 V vs. 0.22 V and 2.41 V vs. 0.19 V, respectively. Furthermore, the self-noises of parylene vs. silicon-based devices were compared as follows: −82.3 ± 3.9 dB vs. −90.4 ± 9.4 dB at 0.1 Hz, −75.7 ± 7.3 dB vs. −98.2 ± 9.9 dB at 1 Hz, and −62.4 ± 7.7 dB vs. −91.1 ± 8.1 dB at 10 Hz. The developed parylene-based electrochemical seismic sensors may function as an enabling technique for further detection of seismic motions in various applications. View Full-Text
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Li, G.; Sun, Z.; Wang, J.; Chen, D.; Chen, J.; Chen, L.; Xu, C.; Qi, W.; Zheng, Y. A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor. Sensors 2018, 18, 1165.
Li G, Sun Z, Wang J, Chen D, Chen J, Chen L, Xu C, Qi W, Zheng Y. A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor. Sensors. 2018; 18(4):1165.Chicago/Turabian Style
Li, Guanglei; Sun, Zhenyuan; Wang, Junbo; Chen, Deyong; Chen, Jian; Chen, Lianhong; Xu, Chao; Qi, Wenjie; Zheng, Yu. 2018. "A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor." Sensors 18, no. 4: 1165.
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