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Sensors 2018, 18(4), 1165;

A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor

1,2,* , 1,2
University of Chinese Academy of Sciences, Beijing 100049, China
Institute of Electronics, Chinese Academy of Sciences, Beijing 100010, China
Tsinghua University, Beijing 100084, China
Affiliated High School of Peking University, Beijing 100080, China
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 24 February 2018 / Revised: 7 April 2018 / Accepted: 9 April 2018 / Published: 11 April 2018
(This article belongs to the Section Physical Sensors)
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This paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene-based electrochemical seismic sensors were fabricated in which the thickness of the insulating spacer was 6.7 μm. Compared to silicon-based counterparts with ~100 μm insulating layers, the parylene-based devices produced higher sensitivities of 490.3 ± 6.1 V/(m/s) vs. 192.2 ± 1.9 V/(m/s) at 0.1 Hz, 4764.4 ± 18 V/(m/s) vs. 318.9 ± 6.5 V/(m/s) at 1 Hz, and 4128.1 ± 38.3 V/(m/s) vs. 254.5 ± 4.2 V/(m/s) at 10 Hz. In addition, the outputs of the parylene vs. silicon devices in response to two transit inputs were compared, producing peak responses of 2.97 V vs. 0.22 V and 2.41 V vs. 0.19 V, respectively. Furthermore, the self-noises of parylene vs. silicon-based devices were compared as follows: −82.3 ± 3.9 dB vs. −90.4 ± 9.4 dB at 0.1 Hz, −75.7 ± 7.3 dB vs. −98.2 ± 9.9 dB at 1 Hz, and −62.4 ± 7.7 dB vs. −91.1 ± 8.1 dB at 10 Hz. The developed parylene-based electrochemical seismic sensors may function as an enabling technique for further detection of seismic motions in various applications. View Full-Text
Keywords: electrochemical seismic sensor; parylene substrate; sensitivity increasing; noise level electrochemical seismic sensor; parylene substrate; sensitivity increasing; noise level

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Li, G.; Sun, Z.; Wang, J.; Chen, D.; Chen, J.; Chen, L.; Xu, C.; Qi, W.; Zheng, Y. A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor. Sensors 2018, 18, 1165.

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