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Sensors 2018, 18(3), 781; https://doi.org/10.3390/s18030781

Design Parameter Optimization of a Silicon-Based Grating Waveguide for Performance Improvement in Biochemical Sensor Application

1
School of Electronic and Electrical Engineering, Hongik University, Seoul 04066, Korea
2
Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University, Sejong 30016, Korea
*
Author to whom correspondence should be addressed.
Received: 19 January 2018 / Revised: 22 February 2018 / Accepted: 3 March 2018 / Published: 5 March 2018
(This article belongs to the Section Biosensors)
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Abstract

We performed numerical analysis and design parameter optimization of a silicon-based grating waveguide refractive index (RI) sensor. The performance of the grating waveguide RI sensor was determined by the full-width at half-maximum (FWHM) and the shift in the resonance wavelength in the transmission spectrum. The transmission extinction, a major figure-of-merit of an RI sensor that reflects both FWHM and resonance shift performance, could be significantly improved by the proper determination of three major grating waveguide parameters: duty ratio, grating period, and etching depth. We analyzed the transmission characteristics of the grating waveguide under various design parameter conditions using a finite-difference time domain method. We achieved a transmission extinction improvement of >26 dB under a given bioenvironmental target change by the proper choice of the design procedure and parameters. This design procedure and choice of appropriate parameters would enable the widespread application of silicon-based grating waveguide in high-performance RI biochemical sensor. View Full-Text
Keywords: diffraction gratings; grating waveguide; refractive index sensor; biological sensing and sensors; optical sensing and sensors diffraction gratings; grating waveguide; refractive index sensor; biological sensing and sensors; optical sensing and sensors
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Hong, Y.-S.; Cho, C.-H.; Sung, H.-K. Design Parameter Optimization of a Silicon-Based Grating Waveguide for Performance Improvement in Biochemical Sensor Application. Sensors 2018, 18, 781.

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