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Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light

State-Province Joint Engineering Laboratory for RF Integration and Micropackaging, College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
State Key Laboratory of Millimeter Waves, Southeast University, Nanjing 210096, China
Author to whom correspondence should be addressed.
Sensors 2018, 18(2), 660;
Received: 22 January 2018 / Revised: 19 February 2018 / Accepted: 21 February 2018 / Published: 23 February 2018
(This article belongs to the Section Biosensors)
PDF [4465 KB, uploaded 14 September 2018]


The sensitivity of silicon nanopillar array for relative humidity (RH) with UV illumination was investigated in this work. The silicon nanopillar array was prepared by nanosphere lithography. Electrical measurements were performed on its sensing performance with and without UV irradiation. It was found that UV light improved the humidity sensitivity with different UV light wavelengths and power. The sensor response and recovery time were reduced. Furthermore, the turn-on threshold voltage and the operating voltage both decreased. These sensing characteristics can mainly be attributed to the electron-hole pairs generated by UV light. These electron-hole pairs promote the adsorption and desorption processes. The results indicate that silicon nanopillar array materials with UV irradiation might be competitive as novel sensing materials for fabricating humidity sensors with high performances. View Full-Text
Keywords: silicon nanopillar; humidity sensing; UV light silicon nanopillar; humidity sensing; UV light

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Li, W.; Ding, C.; Cai, Y.; Liu, J.; Wang, L.; Ren, Q.; Xu, J. Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light. Sensors 2018, 18, 660.

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