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Journal: Sensors, 2018
Volume: 18
Number: 398
Article:
A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions
Authors:
by
Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
Link:
https://www.mdpi.com/1424-8220/18/2/398
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