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Journal: Sensors, 2018
Volume: 18
Number: 398

Article: A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions
Authors: by Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
Link: https://www.mdpi.com/1424-8220/18/2/398

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