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Sensors 2018, 18(11), 3875; https://doi.org/10.3390/s18113875

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

1
Department of Mechanical Engineering, National Cheng Kung University, Tainan City 70101, Taiwan
2
Department of Mechanical Engineering, National Chung Cheng University, Chiayi County 62102, Taiwan
3
Advanced Institute of Manufacturing with High-tech Innovations, National Chung Cheng University, Chiayi County 62102, Taiwan
*
Author to whom correspondence should be addressed.
Received: 8 October 2018 / Revised: 7 November 2018 / Accepted: 9 November 2018 / Published: 10 November 2018
(This article belongs to the Special Issue I3S 2018 Selected Papers)
Full-Text   |   PDF [6683 KB, uploaded 10 November 2018]   |  

Abstract

This study designs and characterizes a novel precise measurement system for simultaneously measuring six-degree-of-freedom geometric motion errors of a long linear stage of a machine tool. The proposed measurement system is based on a method combined with the geometrical optics method and laser interferometer method. In contrast to conventional laser interferometers using only the interferometer method, the proposed measurement system can simultaneously measure six-degree-of-freedom geometric motion errors of a long linear stage with lower cost and faster operational time. The proposed measurement system is characterized numerically using commercial software ZEMAX and mathematical modeling established by using a skew-ray tracing method, a homogeneous transformation matrix, and a first-order Taylor series expansion. The proposed measurement system is then verified experimentally using a laboratory-built prototype. The experimental results show that, compared to conventional laser interferometers, the proposed measurement system better achieves the ability to simultaneously measure six-degree-of-freedom geometric errors of a long linear stage (a traveling range of 250 mm). View Full-Text
Keywords: geometric errors; linear stage; error measurement; error analysis; machine tool; multiple-degree-of-freedom error geometric errors; linear stage; error measurement; error analysis; machine tool; multiple-degree-of-freedom error
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Liu, C.-S.; Pu, Y.-F.; Chen, Y.-T.; Luo, Y.-T. Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage. Sensors 2018, 18, 3875.

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