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Open AccessArticle

Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

1
Photonics Research Labs, Universitat Politècnica de València, c/ Camino de Vera s/n, 46021 Valencia, Spain
2
R&D Department, VLC Photonics S.L., c/ Camino de Vera s/n, 46021 Valencia, Spain
3
Grupo de Transductores Químicos (GTQ), Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 08193 Cerdanyola del Vallès, Barcelona, Spain
*
Author to whom correspondence should be addressed.
Sensors 2017, 17(9), 2088; https://doi.org/10.3390/s17092088
Received: 1 August 2017 / Revised: 31 August 2017 / Accepted: 6 September 2017 / Published: 12 September 2017
(This article belongs to the Special Issue Silicon Technologies for Photonic Sensors)
Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform. View Full-Text
Keywords: silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer
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MDPI and ACS Style

Muñoz, P.; Micó, G.; Bru, L.A.; Pastor, D.; Pérez, D.; Doménech, J.D.; Fernández, J.; Baños, R.; Gargallo, B.; Alemany, R.; Sánchez, A.M.; Cirera, J.M.; Mas, R.; Domínguez, C. Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications. Sensors 2017, 17, 2088. https://doi.org/10.3390/s17092088

AMA Style

Muñoz P, Micó G, Bru LA, Pastor D, Pérez D, Doménech JD, Fernández J, Baños R, Gargallo B, Alemany R, Sánchez AM, Cirera JM, Mas R, Domínguez C. Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications. Sensors. 2017; 17(9):2088. https://doi.org/10.3390/s17092088

Chicago/Turabian Style

Muñoz, Pascual; Micó, Gloria; Bru, Luis A.; Pastor, Daniel; Pérez, Daniel; Doménech, José D.; Fernández, Juan; Baños, Rocío; Gargallo, Bernardo; Alemany, Rubén; Sánchez, Ana M.; Cirera, Josep M.; Mas, Roser; Domínguez, Carlos. 2017. "Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications" Sensors 17, no. 9: 2088. https://doi.org/10.3390/s17092088

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