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Sensors 2017, 17(9), 2041; https://doi.org/10.3390/s17092041

Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy

1
Electronic Instrumentation Laboratory, Microelectronics Department, Faculty of EEMCS, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands
2
Life Science Trace Gas Research Group, Department of Molecular and Laser Physics, Institute for Molecules and Materials, Radboud University Nijmegen, Heijendaalseweg 135, 6525 AJ Nijmegen, The Netherlands
*
Author to whom correspondence should be addressed.
Received: 7 August 2017 / Revised: 31 August 2017 / Accepted: 4 September 2017 / Published: 6 September 2017
(This article belongs to the Special Issue Integrated Photonic Technologies for Sensing Applications)
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Abstract

Increasing demand for field instruments designed to measure gas composition has strongly promoted the development of robust, miniaturized and low-cost handheld absorption spectrometers in the mid-infrared. Efforts thus far have focused on miniaturizing individual components. However, the optical absorption path that the light beam travels through the sample defines the length of the gas cell and has so far limited miniaturization. Here, we present a functionally integrated linear variable optical filter and gas cell, where the sample to be measured is fed through the resonator cavity of the filter. By using multiple reflections from the mirrors on each side of the cavity, the optical absorption path is elongated from the physical m m -level to the effective m m -level. The device is batch-fabricated at the wafer level in a CMOS-compatible approach. The optical performance is analyzed using the Fizeau interferometer model and demonstrated with actual gas measurements. View Full-Text
Keywords: gas sensors; optical absorption spectroscopy; mid-infrared; microcavities; Fabry–Perot; Fizeau interferometer gas sensors; optical absorption spectroscopy; mid-infrared; microcavities; Fabry–Perot; Fizeau interferometer
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Ayerden, N.P.; Mandon, J.; Harren, F.J.M.; Wolffenbuttel, R.F. Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy. Sensors 2017, 17, 2041.

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