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Journal: Sensors, 2017
Volume: 17
Number: 1121
Article:
Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
Authors:
by
Majed S. Al-Ghamdi, Ayman M. Alneamy, Sangtak Park, Beichen Li, Mahmoud E. Khater, Eihab M. Abdel-Rahman, Glenn R. Heppler and Mustafa Yavuz
Link:
https://www.mdpi.com/1424-8220/17/5/1121
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