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Journal: Sensors, 2017
Volume: 17
Number: 2510

Article: Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing
Authors: by Seok-Won Kang, Joe Fragala, Su-Ho Kim and Debjyoti Banerjee
Link: https://www.mdpi.com/1424-8220/17/11/2510

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