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Sensors 2017, 17(10), 2392; https://doi.org/10.3390/s17102392

Fabrication of Ordered SnO2 Nanostructures with Enhanced Humidity Sensing Performance

1
College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
2
State Key Laboratory of Millimeter Waves, Southeast University, Nanjing 210096, China
*
Author to whom correspondence should be addressed.
Received: 19 September 2017 / Revised: 12 October 2017 / Accepted: 18 October 2017 / Published: 20 October 2017
(This article belongs to the Section Chemical Sensors)
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Abstract

Ordered SnO2 nanostructures were prepared as humidity sensors by nanosphere lithography with the magnetron sputtering technique. The X-ray diffraction patterns of SnO2 nanostructures show that all intense diffraction peaks correspond to the crystallographic planes of SnO2. The Atomic Force Microscope (AFM) mage shows that these SnO2 nanostructures exhibited a classic honeycomb structure. The resistance of this sensor was measured to show that the resistance of the sensor decreases with an increase from lower relative humidity (RH) to higher RH. Additionally, the longest response/recovery time was 32 s/42 s for 11–96% RH. The hysteresis for the SnO2 nanostructure sensor was <5%. View Full-Text
Keywords: SnO2 nanostructure; humidity sensor; nanosphere lithography SnO2 nanostructure; humidity sensor; nanosphere lithography
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Li, W.; Liu, J.; Ding, C.; Bai, G.; Xu, J.; Ren, Q.; Li, J. Fabrication of Ordered SnO2 Nanostructures with Enhanced Humidity Sensing Performance. Sensors 2017, 17, 2392.

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