Next Article in Journal
Feature Weight Driven Interactive Mutual Information Modeling for Heterogeneous Bio-Signal Fusion to Estimate Mental Workload
Next Article in Special Issue
Modeling and Compensation of Random Drift of MEMS Gyroscopes Based on Least Squares Support Vector Machine Optimized by Chaotic Particle Swarm Optimization
Previous Article in Journal
Assessment of Ionospheric Gradient Impacts on Ground-Based Augmentation System (GBAS) Data in Guangdong Province, China
Article Menu
Issue 10 (October) cover image

Export Article

Open AccessArticle
Sensors 2017, 17(10), 2306; https://doi.org/10.3390/s17102306

Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes

1,2
,
1,2
,
1,2
and
1,2,*
1
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2
Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
*
Author to whom correspondence should be addressed.
Received: 28 August 2017 / Revised: 5 October 2017 / Accepted: 7 October 2017 / Published: 11 October 2017
(This article belongs to the Special Issue MEMS Resonators)
Full-Text   |   PDF [32829 KB, uploaded 11 October 2017]   |  

Abstract

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer function. The obtained expressions are verified through numerical simulations, demonstrating close agreements between the analytic and the numerical models. Based on the derived expressions for the PSD of the NER, the impacts of the modal frequency split, quality factor, and the gain of the feedback forcer, as well as the gain of the signal conditioning circuit, on the gyroscope noise characteristics are theoretically analyzed. In addition, the angle random walk (ARW) and the standard deviation of the NER are also discussed through the PSD models. Finally, the effects of the loop closing, the mode matching, and the gain of the feedback forcer on the PSD of the NER were verified via a MEMS vibratory gyroscope with a tunable modal frequency split. View Full-Text
Keywords: angle random walk; force-rebalance; MEMS vibratory gyroscope; mode matching; noise analysis; noise equivalent rate; power spectral density; open-loop angle random walk; force-rebalance; MEMS vibratory gyroscope; mode matching; noise analysis; noise equivalent rate; power spectral density; open-loop
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Ding, X.; Jia, J.; Gao, Y.; Li, H. Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes. Sensors 2017, 17, 2306.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top