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Sensors 2016, 16(8), 1191;

Micromechanical Characterization of Polysilicon Films through On-Chip Tests

Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 1 April 2016 / Revised: 21 June 2016 / Accepted: 26 July 2016 / Published: 28 July 2016
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When the dimensions of polycrystalline structures become comparable to the average grain size, some reliability issues can be reported for the moving parts of inertial microelectromechanical systems (MEMS). Not only the overall behavior of the device turns out to be affected by a large scattering, but also the sensitivity to imperfections gets enhanced. In this work, through on-chip tests, we experimentally investigate the behavior of thin polysilicon samples using standard electrostatic actuation/sensing. The discrepancy between the target and actual responses of each sample has then been exploited to identify: (i) the overall stiffness of the film and, according to standard continuum elasticity, a morphology-based value of its Young’s modulus; (ii) the relevant over-etch induced by the fabrication process. To properly account for the aforementioned stochastic features at the micro-scale, the identification procedure has been based on particle filtering. A simple analytical reduced-order model of the moving structure has been also developed to account for the nonlinearities in the electrical field, up to pull-in. Results are reported for a set of ten film samples of constant slenderness, and the effects of different actuation mechanisms on the identified micromechanical features are thoroughly discussed. View Full-Text
Keywords: MEMS; polysilicon film; on-chip test; over-etch variation; particle filtering; reduced-order modeling MEMS; polysilicon film; on-chip test; over-etch variation; particle filtering; reduced-order modeling

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Mirzazadeh, R.; Eftekhar Azam, S.; Mariani, S. Micromechanical Characterization of Polysilicon Films through On-Chip Tests. Sensors 2016, 16, 1191.

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