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Sensors 2016, 16(8), 1185;

Monolithic Cylindrical Fused Silica Resonators with High Q Factors

College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China
Authors to whom correspondence should be addressed.
Academic Editor: Francesco De Leonardis
Received: 9 May 2016 / Revised: 2 July 2016 / Accepted: 22 July 2016 / Published: 28 July 2016
(This article belongs to the Section Physical Sensors)
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The cylindrical resonator gyroscope (CRG) is a typical Coriolis vibratory gyroscope whose performance is determined by the Q factor and frequency mismatch of the cylindrical resonator. Enhancing the Q factor is crucial for improving the rate sensitivity and noise performance of the CRG. In this paper, for the first time, a monolithic cylindrical fused silica resonator with a Q factor approaching 8 × 105 (ring-down time over 1 min) is reported. The resonator is made of fused silica with low internal friction and high isotropy, with a diameter of 25 mm and a center frequency of 3974.35 Hz. The structure of the resonator is first briefly introduced, and then the experimental non-contact characterization method is presented. In addition, the post-fabrication experimental procedure of Q factor improvement, including chemical and thermal treatment, is demonstrated. The Q factor improvement by both treatments is compared and the primary loss mechanism is analyzed. To the best of our knowledge, the work presented in this paper represents the highest reported Q factor for a cylindrical resonator. The proposed monolithic cylindrical fused silica resonator may enable high performance inertial sensing with standard manufacturing process and simple post-fabrication treatment. View Full-Text
Keywords: cylindrical resonator; fused silica; Q factor; chemical etching; annealing cylindrical resonator; fused silica; Q factor; chemical etching; annealing

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Pan, Y.; Wang, D.; Wang, Y.; Liu, J.; Wu, S.; Qu, T.; Yang, K.; Luo, H. Monolithic Cylindrical Fused Silica Resonators with High Q Factors. Sensors 2016, 16, 1185.

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